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《工程塑料应用》 2022年第11期
DOI:10.3969/j.issn.1001-3539.2022.11.012
紫外光固化微压印工艺对有序微结构阵列形貌的影响
贺建芸,吴国栋,付俊杰,曹俊伟,林纯丞,魏靖柠
北京化工大学机电工程学院,北京 100029 
Effect of UV Curing Microimprinting Process on Morphology of Ordered Microstructure Arrays
He Jianyun, Wu Guodong, Fu Junjie, Cao Junwei, Lin Chuncheng, Wei Jingning
College of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing 100029, China 
摘要:常温下,将聚氨酯丙烯酸酯树脂、三丙二醇二丙烯酸酯、新戊二醇二丙烯酸酯以及光引发剂按一定比例均匀混合,并真空消泡,制得液体光固化材料。利用紫外光固化微压印工艺制备出圆柱形微结构阵列和常规六角棱柱微结构阵列。利用3D激光共聚焦显微镜,从微结构阵列形貌的角度评估了紫外光辐射强度和压应力大小对微结构阵列形貌规律的影响,并进行了数值化研究。结果表明,在压应力为13 N/mm2和辐射强度为5 100 mJ/cm2时制备的微结构阵列有较好的形貌效果,圆柱形微结构单元的高度复制度为91.2%,直径复制度为97.8%;对于常规六角棱柱微结构单元,高度复制度为90%,对角线长度复制度为95.7%。紫外光固化微压印有望成为一种新型的微结构阵列的制造方法,这将有助于解决目前加工方法所存在的问题,改进微结构阵列的制造工艺,在光电子学、精密工程和生物化学领域具有重要的应用前景。 
Abstract:At room temperature, polyurethane acrylate, tripropylene glycol diacrylate, neopentyl glycol diacrylate and photoinitiator were uniformly mixed in a certain proportion, and defoaming was carried out in vacuum, then the liquid light-curable materials were prepared. The cylindrical microstructure array and the conventional hexagonal prism microstructure were fabricated by UV curing microimprinting process. Using 3D laser confocal microscope, the effects of UV irradiation intensity and compressive stress on the morphology of the microstructure array were evaluated from the perspective of the morphology of the microstructure array, and a numerical study was carried out. The results show that the prepared micro structure array has a good morphology effect when the compressive stress is 13 N/mm2 and the irradiation intensity is 5 100 mJ/cm2. The height replication rate of cylindrical micro structure unit is 91.2%, and the diameter replication rate is 97.8%. For the conventional hexagonal prism microstructure unit, the height replication is 90%, and the diagonal length replication is 95.7%. UV curing microimprinting is expected to become a new manufacturing method of micro structure arrays, which will help solve the problems existing in the current processing methods and improve the manufacturing process of micro structure arrays. It has important application prospects in optoelectronics, precision engineering and biochemistry. 
关键词:紫外;光固化;微压印;微结构阵列;微结构制造工艺 
Keywords:ultraviolet; light curing; microimprinting; micro structure array; microstructure manufacturing process 
本文引用格式:
贺建芸,吴国栋,付俊杰,等.紫外光固化微压印工艺对有序微结构阵列形貌的影响[J].工程塑料应用,2022,50(11):74-78.
He Jianyun,Wu Guodong,Fu Junjie,et al. Effect of UV curing microimprinting process on morphology of ordered microstructure arrays[J]. Engineering Plastics Application,2022,50(11):74-78. 

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